透射菊池衍射(TKD),是一种基于SEM,应用传统EBSD硬件对电子透明样品进行研究的新方法。已经证明,该方法可使空间分辨率优于10nm。TKD技术是纳米结构和大变形样品EBSD表征的理想技术。
此TKD样品台为t-EBSD专用样品台。
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TKD uses conventional EBSD hardware and software, but the samples are thin, electron transparent samples. The diffraction signal is obtained from a few to tens of nms of the bottom sample surface, so sample preparation is important.The main difference between EBSD and t-EBSD is how the sample is positioned in the SEM chamber. A typical representation of the configuration required, is shown in figure 1 on page 2. In this representation the sample is positioned at an angle (20 degrees) to the electron beam, however, other studies orientate the sample horizontally. The optimum angle to use depends on the position of the EBSD detector and the working distance. TKD data can be collected and presented in the same way as conventional EBSD data.
This device allows foils or grids (both standard TEM grids and Nanomanipulator support grids) to be accommodated directly in a reversible cassette. This provides mechanical support to the sample and allows the either surface to be viewed in the SEM, without the need to demount the sample. The cassette can also be mounted on the front face of the block for convention EBSD. An adjustable beam stop prevents stray through beam from scattering back onto the phosphor screen during TKD analysis. This greatly enhances contrast of the Electron Forward Scattered Pattern.
• The thin sample is positioned and held between two plates
• There is a recessed section in the lower plate so that the sample can be easily positioned
• When the sample is located the top plate is replaced and the screws tightened
• However the fixing screws do not need to be removed when changing or loading samples.
• The screws are loosened and the top plate which holds the sample in position can then be lifted and
slid back out of the way.
• The sandwich which holds the sample can be inverted, should the sample be mounted upside down
• In addition, it can be mounted for conventional EBSD
• The brass post has alignment flats to ensure that the alignment of the holder can be controlled
• The sample holder includes a beam stop to prevent the beam which passes through the thin sample from being reflected back up onto the EBSD screen, and thereby interfere with the EBSP
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